1. Project Introduction :

Atomic force microscopy (AFM) is a scanning probe microscope with excellent vertical resolution (sub-nanometer). It is a powerful tool for studying surface topology and surface roughness values. Electrical and mechanical properties can be measured with tunneled AFM (TUNA) and nanoindentation application modules.

2. Specifications for analyzing indicators

Vertical resolution 0.1nm

Optimal lateral resolution 7nm

Maximum scanning area 80um x 80um

TUNA 10pA – 10uA current range

The force range is from 1-100uN in Nanoindentation

3. Application cases

(1) Surface morphology and surface roughness

(2) Nanoindentation

Indentation is a common tool for determining the mechanical properties of a sample, such as hardness or modulus. With the help of a diamond probe on the AFM system, it can incorporate extremely small sample volumes to obtain valuable data. AFM can also perform nano-scratch and abrasion tests to study film adhesion and durability.

(3) Conductive atomic force microscope C-AFM

A certain voltage is applied to the sample through the sample chuck. When the AFM tip is grounded, if the conductor has a current flowing through the sample. Current mapping can be obtained with topography.