1. Project introduction:

Atomic force microscopy studies the surface morphology, structure and properties of substances by detecting the very weak interatomic interaction force between the surface of the sample to be measured and the tiny probe. The instrument has extremely high resolution for the analysis of sample surface roughness, down to or near atomic level. In addition to this, atomic force microscopy can perform various quantitative analyses of materials in different modes.

2. Application advantages:

Minimum to 0.1nm vertical resolution, a variety of application modules expanded to meet different testing needs; Vacuum-adsorption sample stage, can measure up to 12 inches of silicon wafers without destructive cutting, tap mode test, can adapt to flexible sample surfaces.

(1) Surface morphology and surface roughness

AFM can display surface imaging topology and surface roughness values. AFM can display surface imaging topology and surface roughness values. The roughness ranges from a few hundred nanometers (nm) to a few angstroms (Å) quartz surface ultra-smooth, Ra = 0.16nm, AFM is able to show small features on the surface.

(2) Nanoindentation

Indentation is a common tool for determining the mechanical properties of a sample, such as hardness or modulus. With the help of a diamond probe on the AFM system, it can incorporate extremely small sample volumes to obtain valuable data. AFM can also perform nano-scratch and abrasion tests to study film adhesion and durability.

(3) Conductive atomic force microscope C-AFM

The conductive probe scans the sample surface in contact mode, and when the sample stage is applied the corresponding positive and negative bias pressure, an electric current will be formed between the sample stage, the conductive sample and the probe, and the conductive image corresponding to the surface topography can be obtained. By changing the bias size, a current-voltage curve for the leakage point can also be obtained. Current Test Range: 10pA – 1uA, Bias Range: -1V – 1V.