Wintech-Nano’s research achievements have been selected as exemplary applications by an international scientific instrument giant
Wintech-Nano presented a research paper titled “Quantitative Analysis of Boron Ion Doping in Silicon Nitride/Silicon Oxide Multilayer Films using Dynamic Secondary Ion Mass Spectrometry” at the 23rd International Conference on Electronic Packaging Technology (ICEPT 2022). With authorization from Wintech-Nano, this research achievement was selected by the international scientific instrument giant CAMECA for application demonstration and relevant excerpts were included in their latest technical application report.
Secondary Ion Mass Spectrometry (SIMS) is a surface analysis technique used to detect the chemical composition of small areas on solid surfaces. Its principle involves bombarding the material surface with a primary ion beam emitted from an ion source under high vacuum conditions, and analyzing the composition of the secondary ions using mass spectrometry. The primary ion beam typically has energies ranging from hundreds to tens of thousands of electron volts, allowing it to sputter atoms as well as atomic groups, functional groups, and molecules. Therefore, SIMS can analyze both inorganic and organic structures. It has been widely applied in industries such as semiconductor microelectronics, chemistry, materials science, geology, and biomedical research.
One of the main advantages of SIMS technology compared to other surface analysis techniques is its ability to detect all elements and their isotopes from hydrogen to uranium, with detection limits reaching ppm to ppb levels for certain elements. Currently, SIMS instruments can achieve depth resolutions down to 1 nm and lateral resolutions up to 100 nm. SIMS enables surface micro-area analysis, micro-area imaging, and three-dimensional spatial analysis. It has become an essential tool in fields such as semiconductor doping and diffusion, surface organic contamination, and thin film material interface analysis.
CAMECA
CAMECA was founded in 1929 and is headquartered near Paris, France. It has gained a prestigious reputation for its precision mechanical, optical, and electronic devices. Since the introduction of the Electron Probe Micro-Analyzer (EPMA) in the 1950s and the Secondary Ion Mass Spectrometer (SIMS) in the 1960s, CAMECA has been the undisputed global leader in these technological fields. They have also achieved numerous breakthrough innovations in complementary technologies, such as Low Energy Electron-Excited X-ray Emission Spectrometry (LEXES) and Atom Probe Tomography (APT). CAMECA continuously provides large-scale material analysis instruments to top international research institutions and offers solutions for the precise measurement needs of the semiconductor industry. In 2007, CAMECA was acquired by the leading American scientific instrument company, AMETEK, becoming a part of this global supplier of electronic and electromechanical products and falling under the AMETEK Materials Analysis Division.
As a “comprehensive hospital” for chips in the semiconductor industry chain, Wintech-Nano has reached a world-leading level in the development and application of Secondary Ion Mass Spectrometry (SIMS) technology. Around 2010, Wintech-Nano’s Singapore laboratory was equipped with the first CAMECA 7F-AUTO D-SIMS device in Asia and an IONTOF-5 TOF-SIMS device, and it had a team of top international experts in SIMS analysis. It was also one of the few labs in the world with wafer-level standards. Over the years, Wintech-Nano has independently published several academic papers in the field of SIMS in renowned international journals and academic conferences. Many of its original technologies have received widespread attention from the academic and industrial communities. This time, CAMECA took the initiative to invite Wintech-Nano and cited its original technologies in the application demonstration, which is another classic case of international cooperation for Wintech-Nano and a further acknowledgement of its independent R&D capabilities by the international scientific instrument giant.
In 2024, Wintech-Nano’s headquarters building in Suzhou will be officially put into use. Experts and senior executives from CAMECA headquarters will visit Wintech-Nano in the near future, and both sides will further discuss future cooperation plans to advance their collaboration into deeper areas and jointly promote development in the semiconductor field.
